CAT-O3-E
CAT-O3-E
The CAT-O3 series of ozone destructs safely decompose high concentrations of ozone gas to sub-ppm levels that are below recommended ozone safety limits. The catalytic method of decomposition uses a metal oxide catalyst to passively convert the ozone to oxygen.
- SKU
- CAT-O3-E
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Description / CAT-O3-E
The CAT-O3 series of ozone destructs safely decompose high concentrations of ozone gas to sub-ppm levels that are below recommended ozone safety limits. The catalytic method of decomposition uses a metal oxide catalyst to passively convert the ozone to oxygen.
The CAT-O3 series of ozone destructs are made from a welded stainless steel enclosure protected with a heat shield. They are carefully designed to meet the industry’s stringent safety performance requirements.
Features
- All welded construction
- Self contained
- Rapid reaction time
- No consumables
- No maintenance
- Simple installation
Applications
- Semiconductor
- CVD TEOS/Ozone
- ALD
- MOCVD
- Ashers
- Wet Benches
- Spray Tools
Downloads
More Information
| Manufacturer | Oxidation Technologies |
|---|---|
| Max Flow Rating | Up to 20 SLPM at 340 g/Nm3 |
| Dimensions (LxWxH) | 19”L x 5.13”H x 4”Diameter (482.6 x 130.3 x 101.6 mm) |
| Warranty | 1 Year |